Formation of silicon-on-diamond by direct bonding of plasma-synthesized diamond-like carbon to silicon

	Formation of silicon-on-diamond by direct bonding of plasma-synthesized diamond-like carbon to silicon
	Zhu, M ; Chu, PK ; Shi, XJ ; Wong, M ; Liu, WL ; Lin, CL
刊名	APPLIED PHYSICS LETTERS
	2004
卷号	85 期号:13 页码:2532-2534
关键词	IMMERSION ION-IMPLANTATION AMORPHOUS-CARBON TECHNOLOGY FILMS
ISSN号	0003-6951
通讯作者	Chu, PK, City Univ Hong Kong, Dept Phys & Mat Sci, Tat Chee Ave, Kowloon, Hong Kong, Peoples R China
学科主题	Physics, Applied
收录类别	SCI
语种	英语
公开日期	2012-03-24
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/95459]
专题	上海微系统与信息技术研究所_功能材料与器件_期刊论文
推荐引用方式 GB/T 7714	Zhu, M,Chu, PK,Shi, XJ,et al. Formation of silicon-on-diamond by direct bonding of plasma-synthesized diamond-like carbon to silicon[J]. APPLIED PHYSICS LETTERS,2004,85(13):2532-2534.
APA	Zhu, M,Chu, PK,Shi, XJ,Wong, M,Liu, WL,&Lin, CL.(2004).Formation of silicon-on-diamond by direct bonding of plasma-synthesized diamond-like carbon to silicon.APPLIED PHYSICS LETTERS,85(13),2532-2534.
MLA	Zhu, M,et al."Formation of silicon-on-diamond by direct bonding of plasma-synthesized diamond-like carbon to silicon".APPLIED PHYSICS LETTERS 85.13(2004):2532-2534.