Ferroelectric and piezoelectric properties of Pb(Zr,Ti)O-3 thin films integrated on SOI wafers

	Ferroelectric and piezoelectric properties of Pb(Zr,Ti)O-3 thin films integrated on SOI wafers
	Wang, Y ; Cheng, YL ; Liu, WL ; Lam, TY ; Song, ZT ; Feng, SL ; Chan, HLW ; Choy, CL
刊名	INTEGRATED FERROELECTRICS
	2005
卷号	69 页码:223-229
关键词	LEAD-ZIRCONATE-TITANATE THEORETICAL CALCULATIONS MEMS SI
ISSN号	1058-4587
通讯作者	Wang, Y, Hong Kong Polytech Univ, Dept Appl Phys, Hong Kong, Hong Kong, Peoples R China
学科主题	Engineering, Electrical & Electronic; Physics, Applied; Physics, Condensed Matter
收录类别	SCI
语种	英语
公开日期	2012-03-24
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/95295]
专题	上海微系统与信息技术研究所_功能材料与器件_期刊论文
推荐引用方式 GB/T 7714	Wang, Y,Cheng, YL,Liu, WL,et al. Ferroelectric and piezoelectric properties of Pb(Zr,Ti)O-3 thin films integrated on SOI wafers[J]. INTEGRATED FERROELECTRICS,2005,69:223-229.
APA	Wang, Y.,Cheng, YL.,Liu, WL.,Lam, TY.,Song, ZT.,...&Choy, CL.(2005).Ferroelectric and piezoelectric properties of Pb(Zr,Ti)O-3 thin films integrated on SOI wafers.INTEGRATED FERROELECTRICS,69,223-229.
MLA	Wang, Y,et al."Ferroelectric and piezoelectric properties of Pb(Zr,Ti)O-3 thin films integrated on SOI wafers".INTEGRATED FERROELECTRICS 69(2005):223-229.