Local anodic oxidation of superconducting NbN thin films by an atomic force microscope

	Local anodic oxidation of superconducting NbN thin films by an atomic force microscope
	Yang, XY ; You, LX ; Wang, X ; Zhang, LB ; Kang, L ; Wu, PH
刊名	SUPERCONDUCTOR SCIENCE & TECHNOLOGY
	2009
卷号	22 期号:12 页码:125027-125027
关键词	QUANTUM INTERFERENCE DEVICES FABRICATION NIOBIUM
ISSN号	0953-2048
通讯作者	Yang, XY, Chinese Acad Sci, SIMIT, State Key Lab Funct Mat Informat, Shanghai 200050, Peoples R China
学科主题	Physics, Applied; Physics, Condensed Matter
收录类别	SCI
语种	英语
公开日期	2012-03-24
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/94893]
专题	上海微系统与信息技术研究所_功能材料与器件_期刊论文
推荐引用方式 GB/T 7714	Yang, XY,You, LX,Wang, X,et al. Local anodic oxidation of superconducting NbN thin films by an atomic force microscope[J]. SUPERCONDUCTOR SCIENCE & TECHNOLOGY,2009,22(12):125027-125027.
APA	Yang, XY,You, LX,Wang, X,Zhang, LB,Kang, L,&Wu, PH.(2009).Local anodic oxidation of superconducting NbN thin films by an atomic force microscope.SUPERCONDUCTOR SCIENCE & TECHNOLOGY,22(12),125027-125027.
MLA	Yang, XY,et al."Local anodic oxidation of superconducting NbN thin films by an atomic force microscope".SUPERCONDUCTOR SCIENCE & TECHNOLOGY 22.12(2009):125027-125027.