Determination of the sp(3)/sp(2) ratio in tetrahedral amorphous carbon films by effective medium approximation

	Determination of the sp(3)/sp(2) ratio in tetrahedral amorphous carbon films by effective medium approximation
	Chen, ZY ; Yu, YH ; Zhao, JP ; Wang, X ; Liu, XH ; Shi, TS
刊名	JOURNAL OF APPLIED PHYSICS
	1998
卷号	83 期号:3 页码:1281-1285
关键词	DIAMOND-LIKE CARBON ENERGY SPECTROSCOPY DEPOSITION
ISSN号	0021-8979
通讯作者	Chen, ZY, Chinese Acad Sci, Shanghai Inst Met, Ion Beam Lab, Shanghai 200050, Peoples R China
学科主题	Physics, Applied
收录类别	SCI
语种	英语
公开日期	2012-03-25
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/99007]
专题	上海微系统与信息技术研究所_功能材料与器件_期刊论文（1999年以前)
推荐引用方式 GB/T 7714	Chen, ZY,Yu, YH,Zhao, JP,et al. Determination of the sp(3)/sp(2) ratio in tetrahedral amorphous carbon films by effective medium approximation[J]. JOURNAL OF APPLIED PHYSICS,1998,83(3):1281-1285.
APA	Chen, ZY,Yu, YH,Zhao, JP,Wang, X,Liu, XH,&Shi, TS.(1998).Determination of the sp(3)/sp(2) ratio in tetrahedral amorphous carbon films by effective medium approximation.JOURNAL OF APPLIED PHYSICS,83(3),1281-1285.
MLA	Chen, ZY,et al."Determination of the sp(3)/sp(2) ratio in tetrahedral amorphous carbon films by effective medium approximation".JOURNAL OF APPLIED PHYSICS 83.3(1998):1281-1285.