Pulsed laser deposition and characterization of ferroelectric Pb(Zr,Ti)O-3 thin films on silicon-on-insulator substrates

	Pulsed laser deposition and characterization of ferroelectric Pb(Zr,Ti)O-3 thin films on silicon-on-insulator substrates
	Zheng, LR ; Zhang, SK ; Lin, CL
刊名	ACTA PHYSICA SINICA-OVERSEAS EDITION
	1996
卷号	5 期号:5 页码:384-390
关键词	ABLATION SIMOX
ISSN号	1004-423X
通讯作者	Zheng, LR, ACAD SINICA,SHANGHAI INST MET,STATE KEY LAB FUNCT MAT INFORMAT,SHANGHAI 200050,PEOPLES R CHINA
学科主题	Physics, Multidisciplinary
收录类别	SCI
语种	英语
公开日期	2012-03-25
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/98679]
专题	上海微系统与信息技术研究所_功能材料与器件_期刊论文（1999年以前)
推荐引用方式 GB/T 7714	Zheng, LR,Zhang, SK,Lin, CL. Pulsed laser deposition and characterization of ferroelectric Pb(Zr,Ti)O-3 thin films on silicon-on-insulator substrates[J]. ACTA PHYSICA SINICA-OVERSEAS EDITION,1996,5(5):384-390.
APA	Zheng, LR,Zhang, SK,&Lin, CL.(1996).Pulsed laser deposition and characterization of ferroelectric Pb(Zr,Ti)O-3 thin films on silicon-on-insulator substrates.ACTA PHYSICA SINICA-OVERSEAS EDITION,5(5),384-390.
MLA	Zheng, LR,et al."Pulsed laser deposition and characterization of ferroelectric Pb(Zr,Ti)O-3 thin films on silicon-on-insulator substrates".ACTA PHYSICA SINICA-OVERSEAS EDITION 5.5(1996):384-390.