ANOMALOUS DAMAGE BEHAVIOR OF BF2+ IMPLANTATION IN SILICON | |
LIN, CL ; ZHOU, ZY ; LI, XQ ; Zou, SC(邹世昌) ; HEMMENT, PLF | |
刊名 | SECOND INTERNATIONAL CONFERENCE ON THIN FILM PHYSICS AND APPLICATIONS |
1994 | |
卷号 | 2364页码:137-141 |
学科主题 | Optics |
收录类别 | SCI |
原文出处 | http://apps.webofknowledge.com/full_record.do?product=UA&search_mode=GeneralSearch&qid=159&SID=Q17j6Ejh3Mi@ML3HG1p&page=1&doc=1 |
语种 | 英语 |
公开日期 | 2012-03-25 |
内容类型 | 期刊论文 |
源URL | [http://ir.sim.ac.cn/handle/331004/98555] |
专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文(1999年以前) |
推荐引用方式 GB/T 7714 | LIN, CL,ZHOU, ZY,LI, XQ,et al. ANOMALOUS DAMAGE BEHAVIOR OF BF2+ IMPLANTATION IN SILICON[J]. SECOND INTERNATIONAL CONFERENCE ON THIN FILM PHYSICS AND APPLICATIONS,1994,2364:137-141. |
APA | LIN, CL,ZHOU, ZY,LI, XQ,Zou, SC,&HEMMENT, PLF.(1994).ANOMALOUS DAMAGE BEHAVIOR OF BF2+ IMPLANTATION IN SILICON.SECOND INTERNATIONAL CONFERENCE ON THIN FILM PHYSICS AND APPLICATIONS,2364,137-141. |
MLA | LIN, CL,et al."ANOMALOUS DAMAGE BEHAVIOR OF BF2+ IMPLANTATION IN SILICON".SECOND INTERNATIONAL CONFERENCE ON THIN FILM PHYSICS AND APPLICATIONS 2364(1994):137-141. |
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