| Combined Model-Free Decoupling Control and Double Resonant Control in Parallel Nanopositioning Stages for Fast and Precise Raster Scanning | |
| Ling, Jie; Xiao, Xiaohui; Ming, Min; Feng, Zhao | |
| 2016 | |
| 关键词 | Decoupling control Resonant control Vibration damping Cross coupling reduction Nanopositioner |
| 卷号 | 9834 |
| DOI | 10.1007/978-3-319-43506-0_5 |
| 收录类别 | CPCI-S ; EI |
| 会议录 | INTELLIGENT ROBOTICS AND APPLICATIONS, ICIRA 2016, PT I
 |
| 语种 | 英语 |
| URL标识 | 查看原文 |
| ISSN号 | 0302-9743 |
| 内容类型 | 会议论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/3743155 |
| 专题 | 武汉大学 |
| 推荐引用方式 GB/T 7714 | Ling, Jie,Xiao, Xiaohui,Ming, Min,et al. Combined Model-Free Decoupling Control and Double Resonant Control in Parallel Nanopositioning Stages for Fast and Precise Raster Scanning[C]. 见:. |
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