| Combinatorial Nitrogen Gradients in Sputtered Thin Film | |
| Matthews, Bethany; Roberts, Dennice; Talley, Kevin R.; Bauers, Sage R.; Perkins, Craig; Zhang, Qun; Zakutayev, Andriy; Han, Yanbing | |
| 刊名 | ACS COMBINATORIAL SCIENCE
 |
| 2018 | |
| 卷号 | 20期号:7 |
| 关键词 | physical vapor deposition high-throughput experiments spatially resolved characterization thin film combinatorial sputtering |
| ISSN号 | 2156-8952 |
| URL标识 | 查看原文 |
| 语种 | 英语 |
| 内容类型 | 期刊论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/3605775 |
| 专题 | 复旦大学上海医学院 |
| 推荐引用方式 GB/T 7714 | Matthews, Bethany,Roberts, Dennice,Talley, Kevin R.,et al. Combinatorial Nitrogen Gradients in Sputtered Thin Film[J]. ACS COMBINATORIAL SCIENCE,2018,20(7). |
| APA | Matthews, Bethany.,Roberts, Dennice.,Talley, Kevin R..,Bauers, Sage R..,Perkins, Craig.,...&Han, Yanbing.(2018).Combinatorial Nitrogen Gradients in Sputtered Thin Film.ACS COMBINATORIAL SCIENCE,20(7). |
| MLA | Matthews, Bethany,et al."Combinatorial Nitrogen Gradients in Sputtered Thin Film".ACS COMBINATORIAL SCIENCE 20.7(2018). |
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