Effect of magnetron sputtering parameters and stress state of W film precursors on WSe2 layer texture by rapid selenization | |
Li, Hongchao; Gao, Di; Xie, Senlin; Zou, Jianpeng* | |
刊名 | Scientific Reports |
2016 | |
卷号 | 6页码:36451 |
ISSN号 | 2045-2322 |
DOI | 10.1038/srep36451 |
URL标识 | 查看原文 |
WOS记录号 | WOS:000387018200001;PMID:27812031 |
内容类型 | 期刊论文 |
URI标识 | http://www.corc.org.cn/handle/1471x/3346404 |
专题 | 中南大学 |
作者单位 | 1.[Xie, Senlin 2.Zou, Jianpeng 3.Li, Hongchao 4.Gao, Di] Cent S Univ, State Key Lab Powder Met, Changsha 410083, Hunan, Peoples R China. |
推荐引用方式 GB/T 7714 | Li, Hongchao,Gao, Di,Xie, Senlin,et al. Effect of magnetron sputtering parameters and stress state of W film precursors on WSe2 layer texture by rapid selenization[J]. Scientific Reports,2016,6:36451. |
APA | Li, Hongchao,Gao, Di,Xie, Senlin,&Zou, Jianpeng*.(2016).Effect of magnetron sputtering parameters and stress state of W film precursors on WSe2 layer texture by rapid selenization.Scientific Reports,6,36451. |
MLA | Li, Hongchao,et al."Effect of magnetron sputtering parameters and stress state of W film precursors on WSe2 layer texture by rapid selenization".Scientific Reports 6(2016):36451. |
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