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Analytical closed-form solutions for size-dependent static pull-in behavior in electrostatic micro-actuators via Fredholm integral equation
Rokni, Hossein*; Seethaler, Rudolf J.; Milani, Abbas S.; Hosseini-Hashemi, Shahrokh; Li, Xian-Fang
刊名Sensors and Actuators, A: Physical
2013
卷号190页码:32-43
关键词Micro-actuator Size effect Pull-in voltage Analytical solution
ISSN号0924-4247
DOI10.1016/j.sna.2012.10.035
URL标识查看原文
WOS记录号WOS:000314377000006;EI:20125115809987
内容类型期刊论文
URI标识http://www.corc.org.cn/handle/1471x/3315984
专题中南大学
作者单位[Rokni, Hossein] Univ Michigan, Dept Mech Engn, Ann Arbor, MI 48109 USA.
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Rokni, Hossein*,Seethaler, Rudolf J.,Milani, Abbas S.,et al. Analytical closed-form solutions for size-dependent static pull-in behavior in electrostatic micro-actuators via Fredholm integral equation[J]. Sensors and Actuators, A: Physical,2013,190:32-43.
APA Rokni, Hossein*,Seethaler, Rudolf J.,Milani, Abbas S.,Hosseini-Hashemi, Shahrokh,&Li, Xian-Fang.(2013).Analytical closed-form solutions for size-dependent static pull-in behavior in electrostatic micro-actuators via Fredholm integral equation.Sensors and Actuators, A: Physical,190,32-43.
MLA Rokni, Hossein*,et al."Analytical closed-form solutions for size-dependent static pull-in behavior in electrostatic micro-actuators via Fredholm integral equation".Sensors and Actuators, A: Physical 190(2013):32-43.
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