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	Decrease of FIB-induced lateral damage for diamond tool used in nano cutting
	Wu, Wei; Xu, Zongwei; Fang, Fengzhou; Liu, Bing; Xiao, Yinjing; Chen, Jinping; Wang, Xibin; Liu, Hongzhong
刊名	NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
	2014
卷号	330期号:[db:dc_citation_issue]页码:91-98
关键词	Focused ion beam Nanometric cutting edge Nano cutting Ion implantation Minimum thickness of cut
ISSN号	0168-583X
DOI	[db:dc_identifier_doi]
URL标识	查看原文
WOS记录号	[DB:DC_IDENTIFIER_WOSID]
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/3290757
专题	西安交通大学
推荐引用方式 GB/T 7714	Wu, Wei,Xu, Zongwei,Fang, Fengzhou,et al. Decrease of FIB-induced lateral damage for diamond tool used in nano cutting[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,2014,330([db:dc_citation_issue]):91-98.
APA	Wu, Wei.,Xu, Zongwei.,Fang, Fengzhou.,Liu, Bing.,Xiao, Yinjing.,...&Liu, Hongzhong.(2014).Decrease of FIB-induced lateral damage for diamond tool used in nano cutting.NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,330([db:dc_citation_issue]),91-98.
MLA	Wu, Wei,et al."Decrease of FIB-induced lateral damage for diamond tool used in nano cutting".NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 330.[db:dc_citation_issue](2014):91-98.

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