A new process for fabricating tip-shaped polymer microstructure array with patterned metallic coatings

	A new process for fabricating tip-shaped polymer microstructure array with patterned metallic coatings
	Zhou, HB ; Li, G ; Sun, XN ; Zhu, ZH ; Xu, BJ ; Jin, QH ; Zhao, JL ; Ren, QS
刊名	SENSORS AND ACTUATORS A-PHYSICAL
	2009
卷号	150 期号:2 页码:296-301
关键词	SCANNING PROBE MICROSCOPY ATOMIC-FORCE MICROSCOPE DRUG-DELIVERY TECHNOLOGY MICRONEEDLE ELECTRODES NEEDLES CELLS MOLD
ISSN号	0924-4247
通讯作者	Zhou, HB, Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, Nanotechnol Lab, Shanghai 200050, Peoples R China
学科主题	Engineering, Electrical & Electronic; Instruments & Instrumentation
收录类别	SCI
语种	英语
公开日期	2011-12-17
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/38905]
专题	上海微系统与信息技术研究所_微系统技术_期刊论文
推荐引用方式 GB/T 7714	Zhou, HB,Li, G,Sun, XN,et al. A new process for fabricating tip-shaped polymer microstructure array with patterned metallic coatings[J]. SENSORS AND ACTUATORS A-PHYSICAL,2009,150(2):296-301.
APA	Zhou, HB.,Li, G.,Sun, XN.,Zhu, ZH.,Xu, BJ.,...&Ren, QS.(2009).A new process for fabricating tip-shaped polymer microstructure array with patterned metallic coatings.SENSORS AND ACTUATORS A-PHYSICAL,150(2),296-301.
MLA	Zhou, HB,et al."A new process for fabricating tip-shaped polymer microstructure array with patterned metallic coatings".SENSORS AND ACTUATORS A-PHYSICAL 150.2(2009):296-301.