Macropore density as a function of HF-concentration and bias

	Macropore density as a function of HF-concentration and bias
	Bao, XQ ; Lin, JL ; Jiao, JW ; Wang, YL
刊名	ELECTROCHIMICA ACTA
	2007
卷号	53 期号:2 页码:823-828
关键词	N-TYPE SILICON 2-DIMENSIONAL PHOTONIC CRYSTAL P-TYPE SILICON POROUS SILICON PORE FORMATION FORMATION MECHANISMS ANODIC-DISSOLUTION STABILITY ANALYSIS ARRAY FORMATION MORPHOLOGY
ISSN号	0013-4686
通讯作者	Jiao, JW, Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, Natl Key Lab Microsyst Technol, State Key Lab Transducer Technol, Shanghai, Peoples R China
学科主题	Electrochemistry
收录类别	SCI
语种	英语
公开日期	2011-12-17
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/38605]
专题	上海微系统与信息技术研究所_微系统技术_期刊论文
推荐引用方式 GB/T 7714	Bao, XQ,Lin, JL,Jiao, JW,et al. Macropore density as a function of HF-concentration and bias[J]. ELECTROCHIMICA ACTA,2007,53(2):823-828.
APA	Bao, XQ,Lin, JL,Jiao, JW,&Wang, YL.(2007).Macropore density as a function of HF-concentration and bias.ELECTROCHIMICA ACTA,53(2),823-828.
MLA	Bao, XQ,et al."Macropore density as a function of HF-concentration and bias".ELECTROCHIMICA ACTA 53.2(2007):823-828.