Optical fiber accelerometer based on MEMS torsional micromirror - art. no. 68360Q

	Optical fiber accelerometer based on MEMS torsional micromirror - art. no. 68360Q
	Zeng, FL ; Zhong, SL ; Xu, J ; Wu, YM
刊名	MEMS/MOEMS TECHNOLOGIES AND APPLICATIONS III
	2008
卷号	6836 页码:Q8360-Q8360
关键词	SENSORS
ISSN号	0277-786X
通讯作者	Zeng, FL, Chinese Acad Sci, Shanghai Inst Microsyst & Informat technol, State Key Lab Transducer Technol, Natl Key Lab Microsyst Technol, Shanghai 200050, Peoples R China
学科主题	Optics
收录类别	SCI
语种	英语
公开日期	2011-12-17
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/38577]
专题	上海微系统与信息技术研究所_微系统技术_期刊论文
推荐引用方式 GB/T 7714	Zeng, FL,Zhong, SL,Xu, J,et al. Optical fiber accelerometer based on MEMS torsional micromirror - art. no. 68360Q[J]. MEMS/MOEMS TECHNOLOGIES AND APPLICATIONS III,2008,6836:Q8360-Q8360.
APA	Zeng, FL,Zhong, SL,Xu, J,&Wu, YM.(2008).Optical fiber accelerometer based on MEMS torsional micromirror - art. no. 68360Q.MEMS/MOEMS TECHNOLOGIES AND APPLICATIONS III,6836,Q8360-Q8360.
MLA	Zeng, FL,et al."Optical fiber accelerometer based on MEMS torsional micromirror - art. no. 68360Q".MEMS/MOEMS TECHNOLOGIES AND APPLICATIONS III 6836(2008):Q8360-Q8360.