Optical MEMS devices based on micromachined torsion structure - art. no. 683606

	Optical MEMS devices based on micromachined torsion structure - art. no. 683606
	Wu, YM ; Xu, J ; Li, SH ; Wan, ZJ ; Mu, CJ
刊名	MEMS/MOEMS TECHNOLOGIES AND APPLICATIONS III
	2008
卷号	6836 页码:83606-83606
关键词	ATTENUATOR
ISSN号	0277-786X
通讯作者	Wu, YM, Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Transducer Technol, 865 Changning Rd,Changning Dist, Shanghai 200050, Peoples R China
学科主题	Optics
收录类别	SCI
语种	英语
公开日期	2011-12-17
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/38572]
专题	上海微系统与信息技术研究所_微系统技术_期刊论文
推荐引用方式 GB/T 7714	Wu, YM,Xu, J,Li, SH,et al. Optical MEMS devices based on micromachined torsion structure - art. no. 683606[J]. MEMS/MOEMS TECHNOLOGIES AND APPLICATIONS III,2008,6836:83606-83606.
APA	Wu, YM,Xu, J,Li, SH,Wan, ZJ,&Mu, CJ.(2008).Optical MEMS devices based on micromachined torsion structure - art. no. 683606.MEMS/MOEMS TECHNOLOGIES AND APPLICATIONS III,6836,83606-83606.
MLA	Wu, YM,et al."Optical MEMS devices based on micromachined torsion structure - art. no. 683606".MEMS/MOEMS TECHNOLOGIES AND APPLICATIONS III 6836(2008):83606-83606.