YOUNG'S MODULUS SIZE EFFECT OF SCS NANOBEAM BY TENSILE TESTING IN ELECTRON MICROSCOPY

	YOUNG'S MODULUS SIZE EFFECT OF SCS NANOBEAM BY TENSILE TESTING IN ELECTRON MICROSCOPY
	Jin, QH ; Li, T ; Wang, YL ; Li, XX ; Yang, H ; Xu, FF
刊名	2009 IEEE SENSORS, VOLS 1-3
	2009
页码	205-208
关键词	MECHANICAL-PROPERTIES SILICON FABRICATION AFM
通讯作者	Jin, QH, Chinese Acad Sci, SIMIT, Natl Key Lab Microsyst Technol, State Key Labs Transducer Technol, Shanghai, Peoples R China
学科主题	Engineering, Electrical & Electronic
收录类别	SCI
语种	英语
公开日期	2011-12-17
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/38401]
专题	上海微系统与信息技术研究所_微系统技术_期刊论文
推荐引用方式 GB/T 7714	Jin, QH,Li, T,Wang, YL,et al. YOUNG'S MODULUS SIZE EFFECT OF SCS NANOBEAM BY TENSILE TESTING IN ELECTRON MICROSCOPY[J]. 2009 IEEE SENSORS, VOLS 1-3,2009:205-208.
APA	Jin, QH,Li, T,Wang, YL,Li, XX,Yang, H,&Xu, FF.(2009).YOUNG'S MODULUS SIZE EFFECT OF SCS NANOBEAM BY TENSILE TESTING IN ELECTRON MICROSCOPY.2009 IEEE SENSORS, VOLS 1-3,205-208.
MLA	Jin, QH,et al."YOUNG'S MODULUS SIZE EFFECT OF SCS NANOBEAM BY TENSILE TESTING IN ELECTRON MICROSCOPY".2009 IEEE SENSORS, VOLS 1-3 (2009):205-208.