| Rapid crystallization of amorphous silicon films utilizing Ar-H-2 mesoplasma annealing | |
| Lu, Ziyu; Zhang, Sheng; Sheng, Jiang; Gao, Pingqi; Chen, Qixian; Peng, Zhijian; Wu, Sudong; Ye, Jichun | |
| 刊名 | JOURNAL OF CRYSTAL GROWTH
 |
| 2018 | |
| 卷号 | 486页码:142-147 |
| 关键词 | Rapid crystallization Amorphous silicon Mesoplasma annealing |
| ISSN号 | 0022-0248 |
| URL标识 | 查看原文 |
| WOS记录号 | [DB:DC_IDENTIFIER_WOSID] |
| 内容类型 | 期刊论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/3273353 |
| 专题 | 大连理工大学 |
| 作者单位 | 1.China Univ Geosci Beijing, Sch Engn & Technol, Beijing 100083, Peoples R China. 2.Chinese Acad Sci, Ningbo Inst Mat Technol & Engn, Ningbo 315201, Zhejiang, Peoples R China. 3.Chinese Acad Sci, Ningbo Inst Mat Technol & Engn, Ningbo 315201, Zhejiang, Peoples R China. 4.Dalian Univ Technol, Sch Life Sci & Biotechnol, Dalian 116024, Peoples R China. 5.China Univ Geosci Beijing, Sch Engn & Technol, Beijing 100083, Peoples R China. |
| 推荐引用方式 GB/T 7714 | Lu, Ziyu,Zhang, Sheng,Sheng, Jiang,et al. Rapid crystallization of amorphous silicon films utilizing Ar-H-2 mesoplasma annealing[J]. JOURNAL OF CRYSTAL GROWTH,2018,486:142-147. |
| APA | Lu, Ziyu.,Zhang, Sheng.,Sheng, Jiang.,Gao, Pingqi.,Chen, Qixian.,...&Ye, Jichun.(2018).Rapid crystallization of amorphous silicon films utilizing Ar-H-2 mesoplasma annealing.JOURNAL OF CRYSTAL GROWTH,486,142-147. |
| MLA | Lu, Ziyu,et al."Rapid crystallization of amorphous silicon films utilizing Ar-H-2 mesoplasma annealing".JOURNAL OF CRYSTAL GROWTH 486(2018):142-147. |
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