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	Error analysis and frequency selection guidelines for three-frequency correction in MOS capacitors
	Zhang, Xizhen; Zhang, Sujuan; Pan, Xiuyu; Zhu, Huichao; Cheng, Chuanhui; Cheng, Yi; Yu, Tao; Xing, Guichao; Zhang, Daming; Bai, Mindi
刊名	SEMICONDUCTOR SCIENCE AND TECHNOLOGY
	2018
卷号	33
关键词	MOS capacitor three-frequency correction five-element model error analysis frequency selection
ISSN号	0268-1242
URL标识	查看原文
WOS记录号	[DB:DC_IDENTIFIER_WOSID]
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/3258841
专题	大连理工大学
作者单位	1.Dalian Maritime Univ, Coll Sci, Dalian 116026, Peoples R China. 2.Yingkou City Agr Engn Sch, Yingkou 115009, Peoples R China. 3.Dalian Univ Technol, Dalian 116024, Peoples R China. 4.Jilin Univ, Changchun 130012, Jilin, Peoples R China.
推荐引用方式 GB/T 7714	Zhang, Xizhen,Zhang, Sujuan,Pan, Xiuyu,et al. Error analysis and frequency selection guidelines for three-frequency correction in MOS capacitors[J]. SEMICONDUCTOR SCIENCE AND TECHNOLOGY,2018,33.
APA	Zhang, Xizhen.,Zhang, Sujuan.,Pan, Xiuyu.,Zhu, Huichao.,Cheng, Chuanhui.,...&Chen, Baojiu.(2018).Error analysis and frequency selection guidelines for three-frequency correction in MOS capacitors.SEMICONDUCTOR SCIENCE AND TECHNOLOGY,33.
MLA	Zhang, Xizhen,et al."Error analysis and frequency selection guidelines for three-frequency correction in MOS capacitors".SEMICONDUCTOR SCIENCE AND TECHNOLOGY 33(2018).

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