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	Development of a Compact Three-Degree-of-Freedom Laser Measurement System with Self-Wavelength Correction for Displacement Feedback of a Nanopositioning Stage
	Cai, Yindi; Lou, Zhifeng; Ling, Siying; Liao, Bo-syun; Fan, Kuang-chao
刊名	APPLIED SCIENCES-BASEL
	2018
卷号	8
关键词	laser diode interferometer wavelength corrector angular error nanopositioning stage
ISSN号	2076-3417
URL标识	查看原文
WOS记录号	[DB:DC_IDENTIFIER_WOSID]
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/3253570
专题	大连理工大学
作者单位	1.Dalian Univ Technol, Sch Mech Engn, Dalian 116023, Peoples R China. 2.Natl Taiwan Univ, Dept Mech Engn, Taibei 10617, Taiwan. 3.Dalian Univ Technol, Sch Mech Engn, Dalian 116023, Peoples R China. 4.Natl Taiwan Univ, Dept Mech Engn, Taibei 10617, Taiwan.
推荐引用方式 GB/T 7714	Cai, Yindi,Lou, Zhifeng,Ling, Siying,et al. Development of a Compact Three-Degree-of-Freedom Laser Measurement System with Self-Wavelength Correction for Displacement Feedback of a Nanopositioning Stage[J]. APPLIED SCIENCES-BASEL,2018,8.
APA	Cai, Yindi,Lou, Zhifeng,Ling, Siying,Liao, Bo-syun,&Fan, Kuang-chao.(2018).Development of a Compact Three-Degree-of-Freedom Laser Measurement System with Self-Wavelength Correction for Displacement Feedback of a Nanopositioning Stage.APPLIED SCIENCES-BASEL,8.
MLA	Cai, Yindi,et al."Development of a Compact Three-Degree-of-Freedom Laser Measurement System with Self-Wavelength Correction for Displacement Feedback of a Nanopositioning Stage".APPLIED SCIENCES-BASEL 8(2018).

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