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	Nano-structures formation by ion beam bombardment on Si surfaces
	An, Shudong; Wang, Xiaoyan; Chen, Xian; Wang, Yanwu; Zhao, Yuqing
刊名	Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology
	2015
卷号	35期号:[db:dc_citation_issue]页码:354-357
关键词	Bombardment time Ion beam bombardment Modification conditions Nanostructured surface Root Mean Square Silicon surfaces Sputtering time Surface textures
ISSN号	1672-7126
DOI	[db:dc_identifier_doi]
URL标识	查看原文
WOS记录号	[DB:DC_IDENTIFIER_WOSID]
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/3234854
专题	西安交通大学
推荐引用方式 GB/T 7714	An, Shudong,Wang, Xiaoyan,Chen, Xian,et al. Nano-structures formation by ion beam bombardment on Si surfaces[J]. Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology,2015,35([db:dc_citation_issue]):354-357.
APA	An, Shudong,Wang, Xiaoyan,Chen, Xian,Wang, Yanwu,&Zhao, Yuqing.(2015).Nano-structures formation by ion beam bombardment on Si surfaces.Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology,35([db:dc_citation_issue]),354-357.
MLA	An, Shudong,et al."Nano-structures formation by ion beam bombardment on Si surfaces".Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology 35.[db:dc_citation_issue](2015):354-357.

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