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	Analysis of radiative energy loss in a polysilicon CVD reactor using Monte Carlo ray tracing method
	Liu, Ying-Wen; An, Li-Sha; Wu, Ren-jie
刊名	APPLIED THERMAL ENGINEERING
	2016
卷号	93期号:[db:dc_citation_issue]页码:269-278
关键词	Monte Carlo ray tracing method CVD reactor Radiative energy loss Polysilicon
ISSN号	1359-4311
DOI	[db:dc_identifier_doi]
URL标识	查看原文
WOS记录号	[DB:DC_IDENTIFIER_WOSID]
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/3221206
专题	西安交通大学
推荐引用方式 GB/T 7714	Liu, Ying-Wen,An, Li-Sha,Wu, Ren-jie. Analysis of radiative energy loss in a polysilicon CVD reactor using Monte Carlo ray tracing method[J]. APPLIED THERMAL ENGINEERING,2016,93([db:dc_citation_issue]):269-278.
APA	Liu, Ying-Wen,An, Li-Sha,&Wu, Ren-jie.(2016).Analysis of radiative energy loss in a polysilicon CVD reactor using Monte Carlo ray tracing method.APPLIED THERMAL ENGINEERING,93([db:dc_citation_issue]),269-278.
MLA	Liu, Ying-Wen,et al."Analysis of radiative energy loss in a polysilicon CVD reactor using Monte Carlo ray tracing method".APPLIED THERMAL ENGINEERING 93.[db:dc_citation_issue](2016):269-278.

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