| Experimental investigation of the electron impact excitation behavior in pulse-modulated radio frequency Ar/O-2 inductively coupled plasma | |
| Xue, Chan; Gao, Fei; Wen, De-Qi; Wang, You-Nian | |
| 刊名 | JOURNAL OF APPLIED PHYSICS
 |
| 2019 | |
| 卷号 | 125 |
| 关键词 | CCD cameras Charge coupled devices Electric discharges Electrons Excited states Impact ionization Inductively coupled plasma Plasma simulation Radio waves, Bi-modal structures Capacitive couplings Discharge conditions Electron-impact excitation Experimental investigations Inductive couplings Intensified charge coupled device camera Radio frequencies, Frequency modulation |
| ISSN号 | 0021-8979 |
| URL标识 | 查看原文 |
| WOS记录号 | [DB:DC_IDENTIFIER_WOSID] |
| 内容类型 | 期刊论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/3220512 |
| 专题 | 大连理工大学 |
| 作者单位 | 1.Dalian Univ Technol, Sch Phys, Key Lab Mat Modificat Laser Ion & Electron Beams, Minist Educ, Dalian 116024, Peoples R China. 2.Michigan State Univ, Dept Elect & Comp Engn, E Lansing, MI 48824 USA. |
| 推荐引用方式 GB/T 7714 | Xue, Chan,Gao, Fei,Wen, De-Qi,et al. Experimental investigation of the electron impact excitation behavior in pulse-modulated radio frequency Ar/O-2 inductively coupled plasma[J]. JOURNAL OF APPLIED PHYSICS,2019,125. |
| APA | Xue, Chan,Gao, Fei,Wen, De-Qi,&Wang, You-Nian.(2019).Experimental investigation of the electron impact excitation behavior in pulse-modulated radio frequency Ar/O-2 inductively coupled plasma.JOURNAL OF APPLIED PHYSICS,125. |
| MLA | Xue, Chan,et al."Experimental investigation of the electron impact excitation behavior in pulse-modulated radio frequency Ar/O-2 inductively coupled plasma".JOURNAL OF APPLIED PHYSICS 125(2019). |
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