| Photochemically combined mechanical polishing of N-type gallium nitride wafer in high efficiency | |
| Ou, Li -Wei; Wang, Ya-Hui; Hu, Hui-Qing; Zhang, Liang-Liang; Dong, Zhi-Gang; Kang, Ren-Ke; Guo, Dong-Ming; Shi, Kang | |
| 刊名 | PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY
 |
| 2019 | |
| 卷号 | 55页码:14-21 |
| 关键词 | Gallium nitride Chemical mechanical polishing Photo-assisted oxidation Potassium persulfate Material removal rate |
| ISSN号 | 0141-6359 |
| URL标识 | 查看原文 |
| WOS记录号 | [DB:DC_IDENTIFIER_WOSID] |
| 内容类型 | 期刊论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/3220104 |
| 专题 | 大连理工大学 |
| 作者单位 | 1.Dalian Univ Technol, Inst Adv Mfg Technol, Sch Mech Engn, 2 Linggong Rd, Dalian 116024, Peoples R China. 2.Xiamen Univ, Dept Chem, Coll Chem & Chem Engn, 422 Siming South Rd, Xiamen 361005, Peoples R China.,Xiamen Univ, State Key Lab Phys Chem Solid Surfaces, Coll Chem & Chem Engn, 422 Siming South Rd, Xiamen 361005, Peoples R China. |
| 推荐引用方式 GB/T 7714 | Ou, Li -Wei,Wang, Ya-Hui,Hu, Hui-Qing,et al. Photochemically combined mechanical polishing of N-type gallium nitride wafer in high efficiency[J]. PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY,2019,55:14-21. |
| APA | Ou, Li -Wei.,Wang, Ya-Hui.,Hu, Hui-Qing.,Zhang, Liang-Liang.,Dong, Zhi-Gang.,...&Shi, Kang.(2019).Photochemically combined mechanical polishing of N-type gallium nitride wafer in high efficiency.PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY,55,14-21. |
| MLA | Ou, Li -Wei,et al."Photochemically combined mechanical polishing of N-type gallium nitride wafer in high efficiency".PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY 55(2019):14-21. |
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