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	Langmuir probe measurements of an RF driven high-density inductively coupled argon plasma
	Ni, Weiyuan; Song, Guicai; Liu, Dongping
	2019
会议名称	2018 4th International Conference on Energy Equipment Science and Engineering, ICEESE 2018
会议日期	2018-12-28
会议地点	Xi'an, China
关键词	Argon Electromagnetic induction Langmuir probes Plasma density, Argon plasmas Axial direction Gas pressures Inductively-coupled Langmuir probe measurements Plasma potential Quartz glass Rf-power, Electron temperature
会议录	2018 4th International Conference on Energy Equipment Science and Engineering, ICEESE 2018
URL标识	查看原文
WOS记录号	[DB:DC_IDENTIFIER_WOSID]
内容类型	会议论文
URI标识	http://www.corc.org.cn/handle/1471x/3219414
专题	大连理工大学
作者单位	1.School of Science, Changchun University of Science and Technology, Changchun, China |School of Electrical Engineering, Dalian University of Technology, Dalian, China 2.School of Science, Changchun University of Science and Technology, Changchun, China 3.School of Electrical Engineering, Dalian University of Technology, Dalian, China
推荐引用方式 GB/T 7714	Ni, Weiyuan,Song, Guicai,Liu, Dongping. Langmuir probe measurements of an RF driven high-density inductively coupled argon plasma[C]. 见:2018 4th International Conference on Energy Equipment Science and Engineering, ICEESE 2018. Xi'an, China. 2018-12-28.

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