QQ客服 官方微博 反馈留言

	Insights into the atomistic behavior in diamond chemical mechanical polishing with center dot OH environment using ReaxFF molecular dynamics simulation
	Shi, Zhuoying; Jin, Zhuji; Guo, Xiaoguang; Yuan, Song; Guo, Jiang
刊名	COMPUTATIONAL MATERIALS SCIENCE
	2019
卷号	166页码:136-142
关键词	Diamond Chemical mechanical polishing Removal mechanism Molecular dynamics simulation ReaxFF
ISSN号	0927-0256
URL标识	查看原文
WOS记录号	[DB:DC_IDENTIFIER_WOSID]
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/3219029
专题	大连理工大学
作者单位	Dalian Univ Technol, Key Lab Precis & Nontradit Machining Technol, Minist Educ, Dalian 116024, Peoples R China.
推荐引用方式 GB/T 7714	Shi, Zhuoying,Jin, Zhuji,Guo, Xiaoguang,et al. Insights into the atomistic behavior in diamond chemical mechanical polishing with center dot OH environment using ReaxFF molecular dynamics simulation[J]. COMPUTATIONAL MATERIALS SCIENCE,2019,166:136-142.
APA	Shi, Zhuoying,Jin, Zhuji,Guo, Xiaoguang,Yuan, Song,&Guo, Jiang.(2019).Insights into the atomistic behavior in diamond chemical mechanical polishing with center dot OH environment using ReaxFF molecular dynamics simulation.COMPUTATIONAL MATERIALS SCIENCE,166,136-142.
MLA	Shi, Zhuoying,et al."Insights into the atomistic behavior in diamond chemical mechanical polishing with center dot OH environment using ReaxFF molecular dynamics simulation".COMPUTATIONAL MATERIALS SCIENCE 166(2019):136-142.

个性服务

查看访问统计

相关权益政策

暂无数据

收藏/分享

除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。