| Ion energy and angular distributions in planar Ar/O-2 inductively coupled plasmas: hybrid simulation and experimental validation | |
| Zhang, Yu-Ru; Zhao, Zhuan-Zhuan; Xue, Chan; Gao, Fei; Wang, You-Nian | |
| 刊名 | JOURNAL OF PHYSICS D-APPLIED PHYSICS
 |
| 2019 | |
| 卷号 | 52 |
| 关键词 | inductively coupled plasma ion energy distribution ion angular distribution hybrid simulation experimental validation |
| ISSN号 | 0022-3727 |
| URL标识 | 查看原文 |
| WOS记录号 | [DB:DC_IDENTIFIER_WOSID] |
| 内容类型 | 期刊论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/3217595 |
| 专题 | 大连理工大学 |
| 作者单位 | Dalian Univ Technol, Key Lab Mat Modificat Laser Ion & Electron Beams, Minist Educ, Sch Phys, Dalian 116024, Peoples R China. |
| 推荐引用方式 GB/T 7714 | Zhang, Yu-Ru,Zhao, Zhuan-Zhuan,Xue, Chan,et al. Ion energy and angular distributions in planar Ar/O-2 inductively coupled plasmas: hybrid simulation and experimental validation[J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS,2019,52. |
| APA | Zhang, Yu-Ru,Zhao, Zhuan-Zhuan,Xue, Chan,Gao, Fei,&Wang, You-Nian.(2019).Ion energy and angular distributions in planar Ar/O-2 inductively coupled plasmas: hybrid simulation and experimental validation.JOURNAL OF PHYSICS D-APPLIED PHYSICS,52. |
| MLA | Zhang, Yu-Ru,et al."Ion energy and angular distributions in planar Ar/O-2 inductively coupled plasmas: hybrid simulation and experimental validation".JOURNAL OF PHYSICS D-APPLIED PHYSICS 52(2019). |
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