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	Frequency dependence of plasma characteristics at different pressures in cylindrical inductively coupled plasma source
	Hao, Zeyu; Song, Jian; Hua, Yue; Zhang, Gailing; Bai, Xiaodong; Ren, Chunsheng
刊名	PLASMA SCIENCE & TECHNOLOGY
	2019
卷号	21
关键词	inductively coupled plasma driving frequency electron heating efficiency electron temperature electron density
ISSN号	1009-0630
URL标识	查看原文
WOS记录号	[DB:DC_IDENTIFIER_WOSID]
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/3217412
专题	大连理工大学
作者单位	Dalian Univ Technol, Minist Educ, Key Lab Mat Modificat Laser Ion & Electron Beams, Dalian 116023, Peoples R China.
推荐引用方式 GB/T 7714	Hao, Zeyu,Song, Jian,Hua, Yue,et al. Frequency dependence of plasma characteristics at different pressures in cylindrical inductively coupled plasma source[J]. PLASMA SCIENCE & TECHNOLOGY,2019,21.
APA	Hao, Zeyu,Song, Jian,Hua, Yue,Zhang, Gailing,Bai, Xiaodong,&Ren, Chunsheng.(2019).Frequency dependence of plasma characteristics at different pressures in cylindrical inductively coupled plasma source.PLASMA SCIENCE & TECHNOLOGY,21.
MLA	Hao, Zeyu,et al."Frequency dependence of plasma characteristics at different pressures in cylindrical inductively coupled plasma source".PLASMA SCIENCE & TECHNOLOGY 21(2019).

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