Investigation of mechanical and tribological properties of super-thick DLC films with different modulation ratios prepared by PECVD

	Investigation of mechanical and tribological properties of super-thick DLC films with different modulation ratios prepared by PECVD
	Yunfeng Wang 1; An Li 1,3; Xia Li 1; Yan Wang1 ; Zhibin Lu1 ; Guangan Zhang3 ; ZhiguoWu 2
刊名	Materials Research Express
	2019
期号	6 页码:086433
内容类型	期刊论文
源URL	[http://ir.licp.cn/handle/362003/26054]
专题	兰州化学物理研究所_固体润滑国家重点实验室
通讯作者	Yunfeng Wang; Guangan Zhang
作者单位	1.Lanzhou Jiaotong University 2.Gansu Academy of Science 3.State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences
推荐引用方式 GB/T 7714	Yunfeng Wang,An Li,Xia Li,et al. Investigation of mechanical and tribological properties of super-thick DLC films with different modulation ratios prepared by PECVD[J]. Materials Research Express,2019(6):086433.
APA	Yunfeng Wang.,An Li.,Xia Li.,Yan Wang.,Zhibin Lu.,...&ZhiguoWu.(2019).Investigation of mechanical and tribological properties of super-thick DLC films with different modulation ratios prepared by PECVD.Materials Research Express(6),086433.
MLA	Yunfeng Wang,et al."Investigation of mechanical and tribological properties of super-thick DLC films with different modulation ratios prepared by PECVD".Materials Research Express .6(2019):086433.