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	Effect of bias voltage on compositional, mechanical and corrosion property of ZrNbAlN multilayer films by unbalanced magnetron sputtering
	Shi, Yong-jing[1,2]; Pan, Fu-sheng[1]; Bao, Ming-dong[3]; Pan, Hu-cheng[1]; Rashad, Muhammad[1]
	2014
卷号	24页码:2856-2863
URL标识	查看原文
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/2974127
专题	重庆大学
推荐引用方式 GB/T 7714	Shi, Yong-jing[1,2],Pan, Fu-sheng[1],Bao, Ming-dong[3],et al. Effect of bias voltage on compositional, mechanical and corrosion property of ZrNbAlN multilayer films by unbalanced magnetron sputtering[J],2014,24:2856-2863.
APA	Shi, Yong-jing[1,2],Pan, Fu-sheng[1],Bao, Ming-dong[3],Pan, Hu-cheng[1],&Rashad, Muhammad[1].(2014).Effect of bias voltage on compositional, mechanical and corrosion property of ZrNbAlN multilayer films by unbalanced magnetron sputtering.,24,2856-2863.
MLA	Shi, Yong-jing[1,2],et al."Effect of bias voltage on compositional, mechanical and corrosion property of ZrNbAlN multilayer films by unbalanced magnetron sputtering".24(2014):2856-2863.

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