Nano-mechanical electro-thermal probe array used for high-density storage based on NEMS technology

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	Nano-mechanical electro-thermal probe array used for high-density storage based on NEMS technology
	Yang, ZX ; Yu, Y ; Li, XX ; Bao, HF
刊名	MICROELECTRONICS RELIABILITY
	2006-01-01
卷号	46 期号:5-6 页码:805-810
关键词	CANTILEVERS HEATERS TIPS
ISSN号	0026-2714
通讯作者	Yang, ZX, Fuzhou Univ, Dept Elect Sci & Appl Phys, Fujian 350002, Peoples R China
学科主题	Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Physics, Applied
收录类别	SCI
语种	英语
公开日期	2011-11-08
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/17305]
专题	上海微系统与信息技术研究所_太赫兹、微波射频技术_期刊论文
推荐引用方式 GB/T 7714	Yang, ZX,Yu, Y,Li, XX,et al. Nano-mechanical electro-thermal probe array used for high-density storage based on NEMS technology[J]. MICROELECTRONICS RELIABILITY,2006,46(5-6):805-810.
APA	Yang, ZX,Yu, Y,Li, XX,&Bao, HF.(2006).Nano-mechanical electro-thermal probe array used for high-density storage based on NEMS technology.MICROELECTRONICS RELIABILITY,46(5-6),805-810.
MLA	Yang, ZX,et al."Nano-mechanical electro-thermal probe array used for high-density storage based on NEMS technology".MICROELECTRONICS RELIABILITY 46.5-6(2006):805-810.