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Effect of indentation speed on deformation behaviors of surface modified silicon: A molecular dynamics study
Chen, Juan; Shi, Junqin; Zhang, Meng; Peng, Weixiang; Fang, Liang; Sun, Kun; Han, Jing
刊名Computational Materials Science
2018
卷号155页码:1-10
关键词Amorphous SiO2 Amorphous structures Chemical-mechanical polishing process Crystalline-to-amorphous Deformation behavior Molecular dynamics simulations Nanoindentation tests Surface-modified
ISSN号0927-0256
URL标识查看原文
内容类型期刊论文
URI标识http://www.corc.org.cn/handle/1471x/2922290
专题西安交通大学
推荐引用方式
GB/T 7714
Chen, Juan,Shi, Junqin,Zhang, Meng,et al. Effect of indentation speed on deformation behaviors of surface modified silicon: A molecular dynamics study[J]. Computational Materials Science,2018,155:1-10.
APA Chen, Juan.,Shi, Junqin.,Zhang, Meng.,Peng, Weixiang.,Fang, Liang.,...&Han, Jing.(2018).Effect of indentation speed on deformation behaviors of surface modified silicon: A molecular dynamics study.Computational Materials Science,155,1-10.
MLA Chen, Juan,et al."Effect of indentation speed on deformation behaviors of surface modified silicon: A molecular dynamics study".Computational Materials Science 155(2018):1-10.
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