Effect of indentation speed on deformation behaviors of surface modified silicon: A molecular dynamics study | |
Chen, Juan; Shi, Junqin; Zhang, Meng; Peng, Weixiang; Fang, Liang; Sun, Kun; Han, Jing | |
刊名 | Computational Materials Science |
2018 | |
卷号 | 155页码:1-10 |
关键词 | Amorphous SiO2 Amorphous structures Chemical-mechanical polishing process Crystalline-to-amorphous Deformation behavior Molecular dynamics simulations Nanoindentation tests Surface-modified |
ISSN号 | 0927-0256 |
URL标识 | 查看原文 |
内容类型 | 期刊论文 |
URI标识 | http://www.corc.org.cn/handle/1471x/2922290 |
专题 | 西安交通大学 |
推荐引用方式 GB/T 7714 | Chen, Juan,Shi, Junqin,Zhang, Meng,et al. Effect of indentation speed on deformation behaviors of surface modified silicon: A molecular dynamics study[J]. Computational Materials Science,2018,155:1-10. |
APA | Chen, Juan.,Shi, Junqin.,Zhang, Meng.,Peng, Weixiang.,Fang, Liang.,...&Han, Jing.(2018).Effect of indentation speed on deformation behaviors of surface modified silicon: A molecular dynamics study.Computational Materials Science,155,1-10. |
MLA | Chen, Juan,et al."Effect of indentation speed on deformation behaviors of surface modified silicon: A molecular dynamics study".Computational Materials Science 155(2018):1-10. |
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