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	Structural and optical properties of zinc nitride films prepared by rf magnetron sputtering
	Yang, Tianlin; Zhang, Zhisheng; Li, Yanhui; Lv, Maoshui; Song, Shumei; Wu, Zhongchen; Yan, Jincheng; Han, Shenghao
刊名	Applied Surface Science
	2009
卷号	Vol.255 No.6页码:3544-3547
URL标识	查看原文
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/2890111
专题	天津大学
作者单位	School of Electronic and Information Engineering, Tianjin University, Tianjin 300072, PR China
推荐引用方式 GB/T 7714	Yang, Tianlin,Zhang, Zhisheng,Li, Yanhui,et al. Structural and optical properties of zinc nitride films prepared by rf magnetron sputtering[J]. Applied Surface Science,2009,Vol.255 No.6:3544-3547.
APA	Yang, Tianlin.,Zhang, Zhisheng.,Li, Yanhui.,Lv, Maoshui.,Song, Shumei.,...&Han, Shenghao.(2009).Structural and optical properties of zinc nitride films prepared by rf magnetron sputtering.Applied Surface Science,Vol.255 No.6,3544-3547.
MLA	Yang, Tianlin,et al."Structural and optical properties of zinc nitride films prepared by rf magnetron sputtering".Applied Surface Science Vol.255 No.6(2009):3544-3547.

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