Edge-contact formed by oxygen plasma and rapid thermal annealing to improve metal-graphene contact resistance

	Edge-contact formed by oxygen plasma and rapid thermal annealing to improve metal-graphene contact resistance
	Su YJ(粟雅娟); Luo J(罗军); Zhu HL(朱慧珑); Wei YY(韦亚一); Yan XY(闫祥宇); Jia KP(贾昆鹏); Yuanjun Ma
刊名	ECS Journal of Solid State Science and Technology
	2018-02-02
文献子类	期刊论文
内容类型	期刊论文
源URL	[http://159.226.55.107/handle/172511/19067]
专题	微电子研究所_集成电路先导工艺研发中心
作者单位	中国科学院微电子研究所
推荐引用方式 GB/T 7714	Su YJ,Luo J,Zhu HL,et al. Edge-contact formed by oxygen plasma and rapid thermal annealing to improve metal-graphene contact resistance[J]. ECS Journal of Solid State Science and Technology,2018.
APA	Su YJ.,Luo J.,Zhu HL.,Wei YY.,Yan XY.,...&Yuanjun Ma.(2018).Edge-contact formed by oxygen plasma and rapid thermal annealing to improve metal-graphene contact resistance.ECS Journal of Solid State Science and Technology.
MLA	Su YJ,et al."Edge-contact formed by oxygen plasma and rapid thermal annealing to improve metal-graphene contact resistance".ECS Journal of Solid State Science and Technology (2018).