半导体器件及其制造方法
秦长亮; 殷华湘; 马小龙; 徐秋霞; 陈大鹏
2017-01-17
著作权人中国科学院微电子研究所
专利号US9548387
国家美国
文献子类发明专利
英文摘要

The present invention discloses a semiconductor device, comprising a plurality of fins located on a substrate and extending along a first direction; a plurality of gate stack structures extending along a second direction and across each of the fins; a plurality of stress layers located in the fins on both sides of the gate stack structures and having a plurality of source and drain regions therein; a plurality of channel regions located in the fins below the gate stack structures; characterized in that the stress layers have connected parts in the fins and that the channel regions enclose the connected parts.

公开日期2014-01-30
申请日期2012-08-27
语种中文
内容类型专利
源URL[http://159.226.55.106/handle/172511/18217]  
专题微电子研究所_集成电路先导工艺研发中心
作者单位中国科学院微电子研究所
推荐引用方式
GB/T 7714
秦长亮,殷华湘,马小龙,等. 半导体器件及其制造方法. US9548387. 2017-01-17.
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