| Angle-resolved x-ray photoelectron spectroscopy study of GeO growth by plasma post-oxidation | |
Zhao C(赵超) ; Wang XL(王晓磊); Wang WW(王文武); Zhao ZQ(赵治乾)
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| 刊名 | Chinese Physics B
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| 2017-08-20 | |
| 文献子类 | 期刊论文 |
| 内容类型 | 期刊论文 |
| 源URL | [http://159.226.55.106/handle/172511/18121]  |
| 专题 | 微电子研究所_集成电路先导工艺研发中心 |
| 作者单位 | 中国科学院微电子研究所 |
| 推荐引用方式 GB/T 7714 | Zhao C,Wang XL,Wang WW,et al. Angle-resolved x-ray photoelectron spectroscopy study of GeO growth by plasma post-oxidation[J]. Chinese Physics B,2017. |
| APA | Zhao C,Wang XL,Wang WW,&Zhao ZQ.(2017).Angle-resolved x-ray photoelectron spectroscopy study of GeO growth by plasma post-oxidation.Chinese Physics B. |
| MLA | Zhao C,et al."Angle-resolved x-ray photoelectron spectroscopy study of GeO growth by plasma post-oxidation".Chinese Physics B (2017). |
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