半导体结构及其制作方法
骆志炯; 梁擎擎; 朱慧珑; 尹海洲
2014-07-01
著作权人中国科学院微电子研究所
专利号US8766371
国家美国
文献子类发明专利
英文摘要

There is provided a semiconductor structure and a method for manufacturing the same. The semiconductor structure according to the present invention comprises: a semiconductor substrate; a channel region formed on the semiconductor substrate; a gate stack formed on the channel region; and source/drain regions formed on both sides of the channel region and embedded in the semiconductor substrate. The gate stack comprises: a gate dielectric layer formed on the channel region; and a conductive layer positioned on the gate dielectric layer. For an nMOSFET, the conductive layer has a compressive stress to apply a tensile stress to the channel region; and for a pMOSFET, the conductive layer has a tensile stress to apply a compressive stress to the channel region.

公开日期2011-12-29
申请日期2011-02-25
语种中文
内容类型专利
源URL[http://10.10.10.126/handle/311049/13278]  
专题微电子研究所_集成电路先导工艺研发中心
作者单位中国科学院微电子研究所
推荐引用方式
GB/T 7714
骆志炯,梁擎擎,朱慧珑,等. 半导体结构及其制作方法. US8766371. 2014-07-01.
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