半导体结构及其制造方法
梁擎擎; 朱慧珑; 吴彬能; 肖卫平; 吴昊
2014-08-19
著作权人中国科学院微电子研究所
专利号US8809955
国家美国
文献子类发明专利
英文摘要

Semiconductor structures and methods for manufacturing the same are disclosed. The semiconductor structure comprises: a gate stack formed on a semiconductor substrate; a super-steep retrograde island embedded in said semiconductor substrate and self-aligned with said gate stack; and a counter doped region embedded in said super-steep retrograde island, wherein said counter doped region has a doping type opposite to a doping type of said super-steep retrograde island. The semiconductor structures and the methods for manufacturing the same facilitate alleviating short channel effects.

公开日期2012-07-19
申请日期2011-04-26
语种中文
内容类型专利
源URL[http://10.10.10.126/handle/311049/13272]  
专题微电子研究所_集成电路先导工艺研发中心
作者单位中国科学院微电子研究所
推荐引用方式
GB/T 7714
梁擎擎,朱慧珑,吴彬能,等. 半导体结构及其制造方法. US8809955. 2014-08-19.
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