| Nanofabrication and characterization of high-line-density x-ray transmission gratings | |
Zhu XL(朱效立) ; Xie CQ(谢常青); Li HL(李海亮)
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| 刊名 | J. Micro/Nanolith. MEMS MOEMS
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| 2017-09-13 | |
| 文献子类 | 期刊论文 |
| 内容类型 | 期刊论文 |
| 源URL | [http://159.226.55.106/handle/172511/18137]  |
| 专题 | 微电子研究所_微电子器件与集成技术重点实验室 |
| 作者单位 | 中国科学院微电子研究所 |
| 推荐引用方式 GB/T 7714 | Zhu XL,Xie CQ,Li HL. Nanofabrication and characterization of high-line-density x-ray transmission gratings[J]. J. Micro/Nanolith. MEMS MOEMS,2017. |
| APA | Zhu XL,Xie CQ,&Li HL.(2017).Nanofabrication and characterization of high-line-density x-ray transmission gratings.J. Micro/Nanolith. MEMS MOEMS. |
| MLA | Zhu XL,et al."Nanofabrication and characterization of high-line-density x-ray transmission gratings".J. Micro/Nanolith. MEMS MOEMS (2017). |
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