The study of helicon plasma source

doi:10.1063/1.3271172

CORC > 近代物理研究所 > 中国科学院近代物理研究所 > 兰州重离子研究装置

	The study of helicon plasma source
	Sun, Liang-Ting1 ; Miao, Ting-Ting 1,2; Zhao, Hong-Wei1 ; Liu, Zhan-Wen 1; Shang, Yong 1,2; Zhao, Huan-Yu 1; Zhang, Xue-Zhen1
	2010-02
关键词	antennas in plasma helicons Langmuir probes plasma density plasma sources
卷号	81
期号	2
DOI	10.1063/1.3271172
英文摘要	Helicon plasma source is known as efficient generator of uniform and high density plasma. A helicon plasma source was developed for investigation of plasma neutralization and plasma lens in the Institute of Modern Physics in China. In this paper, the characteristics of helicon plasma have been studied by using Langmuir four-probe and a high argon plasma density up to 3.9x10(13) cm(-3) have been achieved with the Nagoya type III antenna at the conditions of the magnetic intensity of 200 G, working gas pressure of 2.8x10(-3) Pa, and rf power of 1200 W with a frequency of 27.12 MHz. In the experiment, the important phenomena have been found: for a given magnetic induction intensity, the plasma density became greater with the increase in rf power and tended to saturation, and the helicon mode appeared at the rf power between 200 and 400 W.
会议录	REVIEW OF SCIENTIFIC INSTRUMENTS
会议录出版者	AMER INST PHYSICS
会议录出版地	CIRCULATION & FULFILLMENT DIV, 2 HUNTINGTON QUADRANGLE, STE 1 N O 1, MELVILLE, NY 11747-4501 USA
语种	英语
WOS研究方向	Instruments & Instrumentation ; Physics
WOS记录号	WOS:000275028400150
内容类型	会议论文
源URL	[http://119.78.100.186/handle/113462/57831]
专题	近代物理研究所_兰州重离子研究装置
通讯作者	Miao, Ting-Ting
作者单位	1.Chinese Acad Sci, Inst Modern Phys, Lanzhou 730000, Peoples R China 2.Chinese Acad Sci, Grad Univ, Beijing 100049, Peoples R China
推荐引用方式 GB/T 7714	Sun, Liang-Ting,Miao, Ting-Ting,Zhao, Hong-Wei,et al. The study of helicon plasma source[C]. 见:.