真空室内表面镀TiZrV抽气层的性能研究 | |
马向利; 胡振军; 郭迪周; 侯生军; 蒙峻; 杨晓天; 张军辉; 杨伟顺; 何源; 赵玉刚 | |
刊名 | 真空科学与技术学报;Journal of Vacuum Science and Technology |
2009-11-15 | |
卷号 | 2009期号:06页码:678-681 |
关键词 | 直流磁控溅射 Tizrv抽气层 低温激活 压力分布 |
其他题名 | Gettering of TiZrV Coatings on Pipe Inner-Walls of Vacuum System |
通讯作者 | 蒙峻 |
英文摘要 | A novel technique was developed to turn the gas-load of the long,narrow stainless-steel pipes in vacuum system into non-evaporation getters (NEG).In the technique,the TiZrV films were grown by DC reactive magnetron sputtering on the inner walls of the pipes.The microstructures and compositions of the TiZrV coatings were characterized with scanning electron microscopy (SEM).The impacts of the activation conditions,including the activation temperature and time,on the gettering characteristics were studied.The results show that the TiZrV film,after activation at a lowest temperature of 180℃,is capable of gettering.The pressures at the remote end of the experimental setup and the pump inlet were found to be almost the same with a linear pressure distribution. |
资助项目 | 国家重大科学工程 |
语种 | 中文 |
CSCD记录号 | CSCD:3741899 |
WOS记录号 | CSCD:3741899 |
资助机构 | 国家重大科学工程 |
公开日期 | 2010-10-29 |
内容类型 | 期刊论文 |
源URL | [http://ir.imp.cas.cn/handle/113462/2003] |
专题 | 近代物理研究所_近代物理研究所知识存储(2010之前) 近代物理研究所_真空技术室 |
作者单位 | 中国科学院近代物理研究所 |
推荐引用方式 GB/T 7714 | 马向利,胡振军,郭迪周,等. 真空室内表面镀TiZrV抽气层的性能研究[J]. 真空科学与技术学报;Journal of Vacuum Science and Technology,2009,2009(06):678-681. |
APA | 马向利.,胡振军.,郭迪周.,侯生军.,蒙峻.,...&赵玉刚.(2009).真空室内表面镀TiZrV抽气层的性能研究.真空科学与技术学报;Journal of Vacuum Science and Technology,2009(06),678-681. |
MLA | 马向利,et al."真空室内表面镀TiZrV抽气层的性能研究".真空科学与技术学报;Journal of Vacuum Science and Technology 2009.06(2009):678-681. |
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