Application of compact Non-Evaporable Getter and Sputter combination in UHV system of HIAF

doi:10.1016/j.vacuum.2018.08.038

	Application of compact Non-Evaporable Getter and Sputter combination in UHV system of HIAF
	Luo, C.1,2,3 ; Li, P.2 ; Xie, W. J.2,3; Wan, Y. P.2; Chai, Z.2; Zhu, X. R.2; Meng, J.2 ; Chen, S. P.1; Yang, W. S.2,3
刊名	VACUUM
	2018-11
卷号	157 页码:159-165
关键词	Large pumping speed combination pump NEG pumps High Intensity Heavy-Ion Accelerator Facility Booster ring Dynamic flow method
ISSN号	0042-207X
DOI	10.1016/j.vacuum.2018.08.038
英文摘要	HIAF-BRing, a new multi-purpose accelerator facility of the High Intensity Heavy-Ion Accelerator Facility project, requires an extremely high vacuum lower than 10(-9) Pa to fulfill the requirements of radioactive beam physics and high energy density physics. Use of large speed Titanium sublimation pump (TSP) in combination with Sputter ion pumps (SIP) is not always feasible due to space limitations. A novel combination pump, based on Non Evaporable getter (NEG) and a 101/s SIP (NEXTorr (R) D 2000-10) has been evaluated as it provides large speed in a more compact design. The two combination pumps (TSP + SIP and NEXTorr D 2000-10) have been tested by dynamic flow method to measure the ultimate pressure, the pumping speed and the suitability for HIAF. Test results show that both combination pumps can be used in the pressure range of 10(-10) Pa. The ultimate pressure of TSP + SIP combination pump is slightly lower than NEXTorr D 2000-10, but the latter one has much larger sorption capacities (H-2: 210200 Pa l vs 265 Pa. l; CO: 430 Pa.l vs 24 Pa. l), which means it is applicable to a wider pressure range. At the same time, after twenty activation cycles, the initial pumping speed of NEXTorr D 2000-10 for H-2 and CO decreased less than 10% as compared with the initial pumping speed of the first activation, which meets the actual vacuum system requirement of HIAF. A dedicated vacuum chamber with collimator and NEXTorr D 2000-10 has been designed and manufactured to stabilize the dynamic vacuum by decreasing the heavy ion induced gas desorption and increasing the gas pumping speed. The static and dynamic vacuum pressure evolution has been simulated to verify the feasibility of the NEXTorr D 2000-10 used in the HIAF-BRing.
资助项目	National Natural Science Foundation of China[11675235]
WOS关键词	VACUUM SYSTEM ; PRESSURE
WOS研究方向	Materials Science ; Physics
语种	英语
出版者	PERGAMON-ELSEVIER SCIENCE LTD
WOS记录号	WOS:000449569600025
内容类型	期刊论文
源URL	[http://119.78.100.186/handle/113462/64427]
专题	中国科学院近代物理研究所
通讯作者	Li, P.
作者单位	1.Lanzhou Univ Technol, Sch Petrochem Engn, Lanzhou 730050, Gansu, Peoples R China 2.Chinese Acad Sci, Inst Modern Phys, Lanzhou 730000, Gansu, Peoples R China 3.Huizhou Res Ctr Ion Sci, Huizhou 516003, Peoples R China
推荐引用方式 GB/T 7714	Luo, C.,Li, P.,Xie, W. J.,et al. Application of compact Non-Evaporable Getter and Sputter combination in UHV system of HIAF[J]. VACUUM,2018,157:159-165.
APA	Luo, C..,Li, P..,Xie, W. J..,Wan, Y. P..,Chai, Z..,...&Yang, W. S..(2018).Application of compact Non-Evaporable Getter and Sputter combination in UHV system of HIAF.VACUUM,157,159-165.
MLA	Luo, C.,et al."Application of compact Non-Evaporable Getter and Sputter combination in UHV system of HIAF".VACUUM 157(2018):159-165.