Impact-energy dependence of atomic mobility in diamondlike carbon film growth

doi:10.1103/PhysRevB.68.235408

	Impact-energy dependence of atomic mobility in diamondlike carbon film growth
	Wei, Q ; Pan, ZY ; Li, ZJ ; Zhang, ZX ; Zang, LK ; Wang, YX ; Ye, XS ; Bai, T ; Wang, C ; Liu, JR
刊名	PHYSICAL REVIEW B
	2003-12-01
卷号	68 页码:5
ISSN号	1098-0121
DOI	10.1103/PhysRevB.68.235408
英文摘要	In this paper, the deposition of energetic C-2 clusters on silicon and diamond surfaces is investigated by molecular dynamics simulation. The impact energy ranges from 0.5 to 60 eV in order to compare with experiments of diamondlike carbon (DLC) film synthesis by femtosecond (fs) pulsed laser deposition. The influence of the impact energy on the deposition dynamics as well as the structure of the synthesized films is addressed. Simulations show that at the earlier stage of the deposition, the mobility of surface atoms, especially the recoil atoms, is enhanced at elevated incident energies, and contributes to the smooth growth of DLC films. Our results are consistent with experimental observations.
WOS关键词	VAPOR-DEPOSITION ; SURFACE ; CHEMISORPTION ; TEMPERATURE ; DIFFUSION
WOS研究方向	Physics
语种	英语
出版者	AMERICAN PHYSICAL SOC
WOS记录号	WOS:000188186400098
内容类型	期刊论文
源URL	[http://119.78.100.186/handle/113462/38456]
专题	中国科学院近代物理研究所
通讯作者	Pan, ZY
作者单位	1.Fudan Univ, Inst Modern Phys, Shanghai 200433, Peoples R China 2.State Key Lab Adv Photon Mat & Devices, Shanghai 200433, Peoples R China 3.NW Inst Nucl Technol, Xian 710024, Peoples R China
推荐引用方式 GB/T 7714	Wei, Q,Pan, ZY,Li, ZJ,et al. Impact-energy dependence of atomic mobility in diamondlike carbon film growth[J]. PHYSICAL REVIEW B,2003,68:5.
APA	Wei, Q.,Pan, ZY.,Li, ZJ.,Zhang, ZX.,Zang, LK.,...&Liu, JR.(2003).Impact-energy dependence of atomic mobility in diamondlike carbon film growth.PHYSICAL REVIEW B,68,5.
MLA	Wei, Q,et al."Impact-energy dependence of atomic mobility in diamondlike carbon film growth".PHYSICAL REVIEW B 68(2003):5.