Investigation of the energetic deposition of Au (001) thin films by molecular-dynamics simulation

	Investigation of the energetic deposition of Au (001) thin films by molecular-dynamics simulation
	Zhang, QY ; Tang, JY ; Zhao, GQ
刊名	NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
	1998-02-01
卷号	135 页码:289-294
关键词	film growth molecular-dynamics simulation
ISSN号	0168-583X
英文摘要	A molecular-dynamics simulation of Au (0 0 1) thin film growth with energetic atoms was carried out. The incident-atom energies were selected as 10.0, 1.0, and 0.1 eV and two kinds of substrate temperatures, 300 and 100 K, were selected to study the effect of substrate temperature on film growth. Three kinds of film growth mode, layer-by-layer growth, layer-by-layer growth followed by 3-dimensional island formation, and 3-dimensional island growth, were observed at the condition of 300 K and higher than 1.0 eV incident-atom energy, 300 K and 0.1 eV incident-atom energy, and 100 K and 0.1 eV incident-atom energy, respectively. The surface coverage, diffracted intensity, morphology, and interface mixing of Au (0 0 1) film deposited with different incident-atom energy and the atom transport were described. The effects of incident-atom energy and substrate temperature on the film growth were also discussed in the article. (C) 1998 Elsevier Science B.V.
WOS关键词	EMBEDDED-ATOM-METHOD ; ULTRAHIGH-VACUUM ; ION-BOMBARDMENT ; FCC METALS ; GROWTH ; EPITAXY ; AG
WOS研究方向	Instruments & Instrumentation ; Nuclear Science & Technology ; Physics
语种	英语
出版者	ELSEVIER SCIENCE BV
WOS记录号	WOS:000074395300053
内容类型	期刊论文
源URL	[http://119.78.100.186/handle/113462/35628]
专题	中国科学院近代物理研究所
通讯作者	Zhang, QY
作者单位	1.Dalian Univ Technol, Dept Phys, State Key Lab Mat Modificat Laser Ion & Electron, Dalian 116024, Peoples R China 2.Fudan Univ, Inst Modern Phys, Accelerator Based Atom & Nucl Phys Lab, Shanghai 200433, Peoples R China
推荐引用方式 GB/T 7714	Zhang, QY,Tang, JY,Zhao, GQ. Investigation of the energetic deposition of Au (001) thin films by molecular-dynamics simulation[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,1998,135:289-294.
APA	Zhang, QY,Tang, JY,&Zhao, GQ.(1998).Investigation of the energetic deposition of Au (001) thin films by molecular-dynamics simulation.NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,135,289-294.
MLA	Zhang, QY,et al."Investigation of the energetic deposition of Au (001) thin films by molecular-dynamics simulation".NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 135(1998):289-294.