Investigation of ion-beam-assisted deposition of DLC films by molecular dynamics simulation

doi:10.1016/j.surfcoat.2004.03.008

	Investigation of ion-beam-assisted deposition of DLC films by molecular dynamics simulation
	Li, ZJ ; Pan, ZY ; Wang, YX ; Wei, Q ; Zang, LK ; Ye, XS ; Bai, I ; Wang, C ; Liu, JR
刊名	SURFACE & COATINGS TECHNOLOGY
	2005-03-01
卷号	192 页码:64-69
关键词	diamond-like carbon film ion-beam-assisted deposition molecular dynamics simulation
ISSN号	0257-8972
DOI	10.1016/j.surfcoat.2004.03.008
英文摘要	In this paper, the growth of diamond-like carbon (DLC) films via ion-beam-assisted deposition (IBAD) is simulated using molecular dynamical simulation. The C2 molecules and Ar ions are selected as deposition and assistance projectiles, respectively. The impact energy of Arranges from 10, 30, 50 to 100 eV. We focus our examination on the effects of the assistance/deposition atomic ratio and the incident energy of Ar ions on the growth dynamics and film structure. Simulation results show that the mobility of surface atoms in the cascade region is enhanced by impacting energetic Ar ions, especially at elevated flux and moderate energy, which favor the growth of denser and smoother films with better adhesion to the substrate. Our results agree well with the experimental observation. (C) 2004 Elsevier B.V. All rights reserved.
WOS关键词	DIAMOND-LIKE CARBON ; VAPOR-DEPOSITION ; GROWTH
WOS研究方向	Materials Science ; Physics
语种	英语
出版者	ELSEVIER SCIENCE SA
WOS记录号	WOS:000226262300009
内容类型	期刊论文
源URL	[http://119.78.100.186/handle/113462/25275]
专题	中国科学院近代物理研究所
通讯作者	Pan, ZY
作者单位	1.Fudan Univ, Inst Modern Phys, Shanghai 200433, Peoples R China 2.Inner Mongolia Univ Nationalities, Dept Phys, Tongliao 028043, Peoples R China 3.State Key Lab Adv Photon Mat & Devices, Shanghai 200433, Peoples R China 4.NW Inst Nucl Technol, Xian 710024, Peoples R China
推荐引用方式 GB/T 7714	Li, ZJ,Pan, ZY,Wang, YX,et al. Investigation of ion-beam-assisted deposition of DLC films by molecular dynamics simulation[J]. SURFACE & COATINGS TECHNOLOGY,2005,192:64-69.
APA	Li, ZJ.,Pan, ZY.,Wang, YX.,Wei, Q.,Zang, LK.,...&Liu, JR.(2005).Investigation of ion-beam-assisted deposition of DLC films by molecular dynamics simulation.SURFACE & COATINGS TECHNOLOGY,192,64-69.
MLA	Li, ZJ,et al."Investigation of ion-beam-assisted deposition of DLC films by molecular dynamics simulation".SURFACE & COATINGS TECHNOLOGY 192(2005):64-69.