| Alignment Method for Linear-Scale Projection Lithography Based on CCD Image Analysis | |
| Ren, Dongxu; Zhao, Zexiang; Xi, Jianpu; Li, Bin; Li, Zhengfeng; Zhao, Huiying; Cui, Lujun; Xu, Hang | |
| 刊名 | SENSORS
 |
| 2018 | |
| 卷号 | 18 |
| 关键词 | alignment method grating linear displacement sensor linear scale projection lithography |
| ISSN号 | 1424-8220 |
| URL标识 | 查看原文 |
| 内容类型 | 期刊论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/2831625 |
| 专题 | 西安交通大学 |
| 推荐引用方式 GB/T 7714 | Ren, Dongxu,Zhao, Zexiang,Xi, Jianpu,et al. Alignment Method for Linear-Scale Projection Lithography Based on CCD Image Analysis[J]. SENSORS,2018,18. |
| APA | Ren, Dongxu.,Zhao, Zexiang.,Xi, Jianpu.,Li, Bin.,Li, Zhengfeng.,...&Xu, Hang.(2018).Alignment Method for Linear-Scale Projection Lithography Based on CCD Image Analysis.SENSORS,18. |
| MLA | Ren, Dongxu,et al."Alignment Method for Linear-Scale Projection Lithography Based on CCD Image Analysis".SENSORS 18(2018). |
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