| Preparation and influencing factors of molybdenum targets and magnetron-sputter-deposited molybdenum thin films | |
| An, Geng; Sun, Jun; Sun, Yuan Jun; Cao, Wei Cheng | |
| 2018 | |
| 关键词 | Crystalline properties Electrical conductivity Electrical resistivity of thin films Grain orientation Influencing factor Microstructure and properties Preparation Sputtering currents |
| 卷号 | 913 |
| 页码 | 853-861 |
| 会议录 | Materials Science Forum
 |
| URL标识 | 查看原文 |
| ISSN号 | 0255-5476 |
| 内容类型 | 会议论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/2829866 |
| 专题 | 西安交通大学 |
| 推荐引用方式 GB/T 7714 | An, Geng,Sun, Jun,Sun, Yuan Jun,et al. Preparation and influencing factors of molybdenum targets and magnetron-sputter-deposited molybdenum thin films[C]. 见:. |
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