A micromachined piezoelectric microgripper for manipulation of   micro/nanomaterials

doi:10.1063/1.4985110

CORC > 北京大学 > 工学院

	A micromachined piezoelectric microgripper for manipulation of micro/nanomaterials
	Shi, Huaduo ; Shi, Weiliang ; Zhang, Ran ; Zhai, Junyi ; Chu, Jinkui ; Dong, Shuxiang
刊名	REVIEW OF SCIENTIFIC INSTRUMENTS
	2017
关键词	MICRO-GRIPPER DESIGN MICROACTUATOR
DOI	10.1063/1.4985110
英文摘要	Micro/nanomaterials and devices have attracted great interest in recent years because of their extensive application prospects in almost all kinds of fields. However, the manipulations of the material at the micro/nanoscale, such as the separation or transfer of a micro/nano-object in the process of assembling micro/nanodevices, are quite difficult. In this paper, we present a micromachined micro-gripper made of photoresist material (SU-8) and driven by piezoelectric Pb(Mg, Nb) O-3-PbTiO3 single crystal pieces. In order to keep two grasping jaws of the micro-gripper operating in the same plane at the micro/nanometer scale, a fine circular flexure hinge was fabricated for elastically connecting them together. After introducing the interface effect, the relationship between the opening stroke of two jaws and the applied voltage was developed and then confirmed by finite element simulation. The micro-gripper was finally installed on a six degree of freedom stage for performing a pick-up, release, and transfer manipulation of a 2 mu m ZnO micro-fiber. The presented piezoelectric micro-gripper shows a great potential for the precise manipulation of a single piece of micro/nanomaterial for micro/nanodevices' assembling. Published by AIP Publishing.; National Natural Science Foundation of China [51132001]; Beijing Municipal Science and Technology Projects [Z131100003213020, Z151100003715003]; SCI(E); ARTICLE; 6; 88
语种	英语
内容类型	期刊论文
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/473018]
专题	工学院
推荐引用方式 GB/T 7714	Shi, Huaduo,Shi, Weiliang,Zhang, Ran,et al. A micromachined piezoelectric microgripper for manipulation of micro/nanomaterials[J]. REVIEW OF SCIENTIFIC INSTRUMENTS,2017.
APA	Shi, Huaduo,Shi, Weiliang,Zhang, Ran,Zhai, Junyi,Chu, Jinkui,&Dong, Shuxiang.(2017).A micromachined piezoelectric microgripper for manipulation of micro/nanomaterials.REVIEW OF SCIENTIFIC INSTRUMENTS.
MLA	Shi, Huaduo,et al."A micromachined piezoelectric microgripper for manipulation of micro/nanomaterials".REVIEW OF SCIENTIFIC INSTRUMENTS (2017).