A High-Voltage Closed-Loop SC Interface for a +/- 50 g Capacitive   Micro-Accelerometer With 112.4 dB Dynamic Range

doi:10.1109/TCSI.2016.2645639

CORC > 北京大学 > 信息科学技术学院

	A High-Voltage Closed-Loop SC Interface for a +/- 50 g Capacitive Micro-Accelerometer With 112.4 dB Dynamic Range
	Zhao, Meng ; Chen, Zhongjian ; Lu, Wengao ; Zhang, Yacong ; Niu, Yuze ; Chen, Guangyi
刊名	IEEE TRANSACTIONS ON CIRCUITS AND SYSTEMS I-REGULAR PAPERS
	2017
关键词	Analogue force feedback capacitive micro-accelerometer high-g high-voltage interface circuit proportional-integral compensation sigma-delta ADC switched capacitor NOISE-ANALYSIS MODULATION CIRCUIT DENSITY MEMS
DOI	10.1109/TCSI.2016.2645639
英文摘要	A low-noise high-linearity switched capacitor interface implemented in a 0.35 mu m 3.3 V/15 V CMOS process is presented in this paper for a +/- 50g capacitive micro-accelerometer. The sensing element is enclosed in an optimized closed loop with proportional-integral compensation, improving the linearity significantly. In order to suppress the flicker noise of the front-end at the lowest cost, a novel switched capacitor PI controller combined with a charge sensitive amplifier using correlated double sampling is proposed. Furthermore, a detailed noise analysis of the proposed CSA-PIC combination with a final goal of achieving 120 dB dynamic range is also presented. The theoretical analysis is verified by the consistency between calculated results and PNoise simulation results. The sensor output can be read in analogue domain from a sample-and-hold buffer or in digital domain from a back-end 2-1 MASH Sigma-Delta ADC. The fabricated prototype circuit measures 11.75 mm(2) and operates under 15-V and 3.3-V supplies at a sampling clock of 111 KHz. Meanwhile, a sensitivity of 99.7 mV/g is achieved with a dynamic range of 112.4 dB over a 200-Hz bandwidth. The accelerometer has a DC nonlinearity of 0.623% in the range of -18 g to +14 g measured in self-test mode and the bias instability is 200 mu g.; National Natural Science Foundation of China [61473007]; SCI(E); ARTICLE; 6; 1328-1341; 64
语种	英语
内容类型	期刊论文
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/473136]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Zhao, Meng,Chen, Zhongjian,Lu, Wengao,et al. A High-Voltage Closed-Loop SC Interface for a +/- 50 g Capacitive Micro-Accelerometer With 112.4 dB Dynamic Range[J]. IEEE TRANSACTIONS ON CIRCUITS AND SYSTEMS I-REGULAR PAPERS,2017.
APA	Zhao, Meng,Chen, Zhongjian,Lu, Wengao,Zhang, Yacong,Niu, Yuze,&Chen, Guangyi.(2017).A High-Voltage Closed-Loop SC Interface for a +/- 50 g Capacitive Micro-Accelerometer With 112.4 dB Dynamic Range.IEEE TRANSACTIONS ON CIRCUITS AND SYSTEMS I-REGULAR PAPERS.
MLA	Zhao, Meng,et al."A High-Voltage Closed-Loop SC Interface for a +/- 50 g Capacitive Micro-Accelerometer With 112.4 dB Dynamic Range".IEEE TRANSACTIONS ON CIRCUITS AND SYSTEMS I-REGULAR PAPERS (2017).