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Localized Metal Doping Effect on Switching Behaviors of TaOx-based RRAM Device
Wang, Zongwei ; Kang, Jian ; Fang, Yichen ; Yu, Zhizhen ; Yang, Xue ; Cai, Yimao ; Wang, Yangyuan ; Huang, Ru
2016
关键词doping RRAM uniformity
英文摘要Memory unit, especially the non-volatile memory (NVM), is an indispensable component in a high performance electronic systems which aims at efficient information processing and storage. Resistive random access memory (RRAM) is one of the most promising candidates among the emerging memory technologies. However, optimization of the variability introduced by the intrinsic stochastic nature of filament formation remains a tough problem. In this paper, both operation voltage and resistance of the device with localized implantation show significant improvement of uniformity compared with uniformly doped device, which can be attributed to the further undermine of the randomness due to localized doping instead of uniformly doping.; CPCI-S(ISTP); caiyimao@pku.edu.cn
语种英语
出处16th Non-Volatile Memory Technology Symposium (NVMTS)
内容类型其他
源URL[http://ir.pku.edu.cn/handle/20.500.11897/459861]  
专题信息科学技术学院
推荐引用方式
GB/T 7714
Wang, Zongwei,Kang, Jian,Fang, Yichen,et al. Localized Metal Doping Effect on Switching Behaviors of TaOx-based RRAM Device. 2016-01-01.
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