Fully transparent flexible tin-doped zinc oxide thin film transistors   fabricated on plastic substrate

doi:10.1038/srep38984

CORC > 北京大学 > 信息科学技术学院

	Fully transparent flexible tin-doped zinc oxide thin film transistors fabricated on plastic substrate
	Han, Dedong ; Zhang, Yi ; Cong, Yingying ; Yu, Wen ; Zhang, Xing ; Wang, Yi
刊名	SCIENTIFIC REPORTS
	2016
关键词	PERFORMANCE STABILITY
DOI	10.1038/srep38984
英文摘要	In this work, we have successfully fabricated bottom gate fully transparent tin-doped zinc oxide thin film transistors (TZO TFTs) fabricated on flexible plastic substrate at low temperature by RF magnetron sputtering. The effect of O-2/Ar gas flow ratio during channel deposition on the electrical properties of TZO TFTs was investigated, and we found that the O-2/Ar gas flow ratio have a great influence on the electrical properties. TZO TFTs on flexible substrate has very nice electrical characteristics with a low off-state current (I-off) of 3 pA, a high on/off current ratio of 2 x 10(7), a high saturation mobility (mu(sat)) of 66.7 cm(2)/V.s, a steep subthreshold slope (SS) of 333 mV/decade and a threshold voltage (V-th) of 1.2V. Root-Mean-Square (RMS) roughness of TZO thin film is about 0.52 nm. The transmittance of TZO thin film is about 98%. These results highlight that the excellent device performance can be realized in TZO film and TZO TFT can be a promising candidate for flexible displays.; National Basic Research Program of China (973 program) [2013CBA01604]; National Natural Science Foundation of China [61275025]; SCI(E); ARTICLE; handedong@pku.edu.cn; 6
语种	英语
内容类型	期刊论文
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/458073]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Han, Dedong,Zhang, Yi,Cong, Yingying,et al. Fully transparent flexible tin-doped zinc oxide thin film transistors fabricated on plastic substrate[J]. SCIENTIFIC REPORTS,2016.
APA	Han, Dedong,Zhang, Yi,Cong, Yingying,Yu, Wen,Zhang, Xing,&Wang, Yi.(2016).Fully transparent flexible tin-doped zinc oxide thin film transistors fabricated on plastic substrate.SCIENTIFIC REPORTS.
MLA	Han, Dedong,et al."Fully transparent flexible tin-doped zinc oxide thin film transistors fabricated on plastic substrate".SCIENTIFIC REPORTS (2016).